Ultratech 03-20-00870 VME Combo Board Assembly

Description:

The Ultratech Stepper 03-20-00870 VME Combo Board is an industrial printed circuit board (PCB) designed to provide VME bus communication, control processing, and system interface functions for Ultratech semiconductor photolithography systems. Commonly installed in Ultratech 4700, 6700, Titan, and Saturn wafer steppers where it serves as a central interface between the VME architecture and the machine's motion control, vision, and I/O subsystems. Semiconductor equipment technicians and field service engineers use this board for replacement of failed control PCBs, preventive maintenance, and restoration of reliable lithography system operation.

Applications:

The Ultratech Stepper 03-20-00870 VME Combo Board is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech photolithography equipment. The board manages communication between multiple system modules through the VME bus architecture, supporting coordinated operation of wafer handling, stage motion, reticle alignment, and machine control functions. Compatibility should be verified using the original part number, board revision, and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 03-20-00870
• Product Type: VME Combo Board / Printed Circuit Board (PCB)
• Bus Architecture: VME
• Function: System communication and machine control interface
• Compatible Equipment: Ultratech 4700, 6700, Titan, and Saturn Wafer Stepper Systems
• Board Revisions: Rev. B, Rev. B1, Rev. X1 (application dependent)
• Mounting: OEM replacement board
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and automation systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 03-20-00784
• Ultratech Stepper 03-18-01699-02
• Ultratech Stepper 03-20-00778