Ultratech 03-20-01989 Five Axis Focus Driver Board

Description:

The Ultratech Stepper 03-20-01989 WAS Driver 5 Axis Focus Driver Board Rev. A1 is used in semiconductor photolithography systems to drive and control the five-axis wafer focus mechanism for precise stage positioning and exposure accuracy. Commonly installed in Ultratech 4700, 6700, Titan, and Saturn wafer steppers used in semiconductor manufacturing and cleanroom wafer fabrication facilities. Maintenance teams and semiconductor equipment service providers use this focus driver board for equipment repairs, preventive maintenance, and replacement of failed OEM motion control electronics.

Applications:

The Ultratech Stepper 03-20-01989 WAS Driver 5 Axis Focus Driver Board Rev. A1 is commonly used in semiconductor wafer steppers, photolithography systems, five-axis focus control assemblies, wafer stage positioning systems, motion control platforms, and cleanroom manufacturing environments requiring high-precision focus control and wafer alignment.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 03-20-01989
• Revision: Rev. A1
• Product Type: WAS Driver 5 Axis Focus Driver Board
• Board Type: Printed Circuit Board (PCB)
• Function: Drives five-axis wafer focus and stage positioning assemblies
• System Compatibility: Ultratech 4700, 6700, Titan, and Saturn Wafer Stepper Systems
• Installation: Direct OEM Replacement
• Application: Semiconductor Photolithography Equipment
• Industrial Applications: Semiconductor Manufacturing and Cleanroom Wafer Fabrication

Common Replacements:

• Ultratech Stepper 03-20-01967 BD Focus Control ASH 5 Axis
• Ultratech Stepper 03-20-01955 BD Focus A/D 5 Axis Board
• Ultratech Stepper 03-20-02040 Transition Focus Driver 5 Axis