Ultratech 0514-372500 Light Pipe Prism Assembly

Description:

The Ultratech Stepper 0514-372500 1100 E Light Pipe Prism is a precision optical prism assembly designed to transmit, condition, and direct illumination within the optical system of Ultratech Model 1100 semiconductor photolithography equipment. Commonly installed in Ultratech Model 1100 wafer steppers where it forms part of the illumination path, ensuring uniform light delivery for accurate wafer exposure. Semiconductor equipment technicians and field service engineers use this optical assembly for replacement of worn or damaged illumination components, preventive maintenance, and restoration of consistent lithography performance. 

Applications:

The Ultratech Stepper 0514-372500 Light Pipe Prism is commonly used in semiconductor wafer fabrication, MEMS manufacturing, and research facilities operating Ultratech Model 1100 photolithography systems. The prism is integrated into the illuminator's light pipe assembly to homogenize and redirect exposure light, improving illumination uniformity and optical efficiency during wafer processing. Compatibility should be verified using the original part number and the applicable Ultratech Model 1100 stepper before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 0514-372500
• Product Type: Light Pipe Prism
• Compatible Model: Ultratech Model 1100
• Function: Optical light transmission and beam conditioning
• Assembly Type: Precision Optical Prism Assembly
• System: Illumination / Light Pipe Assembly
• Compatible Equipment: Ultratech Model 1100 Wafer Stepper
• Mounting: OEM replacement optical component
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography illumination systems

Common Replacements:

• Ultratech Stepper 0554-608400 Light Pipe Assembly
• Ultratech Stepper 1054-605300 UV Cutoff Filter
• Ultratech Stepper 1004-284601 Reheat Mirror