Ultratech 0515-461100 Wafer Fixture Plate Stepper Part

Description:

The Ultratech Stepper 0515-461100 Wafer Fixture Plate is a precision mechanical fixture assembly designed to securely support and accurately position semiconductor wafers during photolithography setup, alignment, inspection, and processing operations. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications where repeatable wafer positioning is essential for high-resolution exposure. Semiconductor equipment technicians and field service engineers use this fixture plate for replacement of worn wafer support components, preventive maintenance, and restoration of precise wafer handling performance. The fixture plate measures approximately 27 in. × 19 in. and is available in Rev. M configurations.

Applications:

The Ultratech Stepper 0515-461100 Wafer Fixture Plate is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography systems. The fixture plate provides a rigid and stable mounting surface for wafer alignment, calibration, inspection, and exposure, ensuring repeatable positioning and improved lithography accuracy. Compatibility should be verified using the original part number, revision level, and the applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 0515-461100
• Revision: Rev. M (application dependent)
• Product Type: Wafer Fixture Plate
• Function: Precision wafer support and positioning
• Assembly Type: Mechanical Fixture Plate
• Approximate Dimensions: 27 in. × 19 in.
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer handling systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-20-02645
• Ultratech Stepper 01-20-03947
• Ultratech Stepper 01-20-08947