Ultratech 1052-671100-D Arm Autoload Assembly

Description:

The Ultratech Stepper 1052-678200 Rev. A Arm Autoload Assembly is a precision wafer handling component designed to automate wafer transfer operations in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers equipped with Smart and Automation Autoloaders, the assembly incorporates the 1052-671100-D autoload arm to provide accurate wafer pickup, positioning, and transfer between cassettes and the exposure stage. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn autoloader components, preventive maintenance, and restoration of reliable automated wafer handling performance.

Applications:

The Ultratech Stepper 1052-678200 Rev. A Arm Autoload Assembly is commonly used in semiconductor wafer fabrication facilities, MEMS manufacturing, research laboratories, and electronics manufacturing environments operating Ultratech photolithography equipment. The assembly functions as part of the automation loader system, ensuring smooth wafer transport, repeatable positioning, and reduced handling errors during production. Compatibility should be verified using the original part numbers 1052-678200 Rev. A and 1052-671100-D, along with the applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 1052-678200
• Revision: Rev. A
• Associated Part Number: 1052-671100-D
• Product Type: Arm Autoload Assembly
• Function: Automated wafer pickup and transfer
• Assembly Type: Precision Wafer Handling Arm
• Compatible Equipment: Ultratech Wafer Stepper Systems with Smart and Automation Autoloaders
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and automated wafer handling systems

Common Replacements:

• Ultratech Stepper 1052-677200 Rev. A
• Ultratech Stepper 1052-671800A
• Ultratech Stepper 1052-671100-D