Ultratech 1054-700310 Optical XY Prism Lens Assembly

Description:

The Ultratech Stepper 1054-700310 Rev. B XY Prism Lens is a precision optical prism assembly designed to direct and condition laser illumination for the X-Y alignment system in Ultratech semiconductor photolithography equipment. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications, the prism provides accurate beam routing and optical alignment required for high-resolution wafer positioning and exposure. Semiconductor equipment technicians and field service engineers use this optical component for replacement of worn or damaged prism lenses, preventive maintenance, and restoration of precise lithography performance.

Applications:

The Ultratech Stepper 1054-700310 Rev. B XY Prism Lens is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography systems. The prism is integrated into the X-Y optical alignment path, where it redirects and conditions laser light to ensure accurate stage positioning, alignment feedback, and repeatable wafer exposure. Compatibility should be verified using the original part number, revision level, and the applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 1054-700310
• Revision: Rev. B
• Product Type: XY Prism Lens
• Function: X-Y optical beam routing and alignment
• Assembly Type: Precision Optical Prism Assembly
• Optical System: X-Y Laser Alignment System
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Mounting: OEM replacement optical component
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography optical alignment systems

Common Replacements:

• Ultratech Stepper 0514-372500 Light Pipe Prism
• Ultratech Stepper 0505-3750001 Y-Stage Mirror Optical Assembly
• Ultratech Stepper Inspection Prism Reticle Reflective Assembly 1-3/4" × 1-3/4"