Ultratech 1064-701065 Theta Wafer Fixture Assembly

Description:

The Ultratech Stepper 1064-701065 Rev. A Theta Wafer Fixture Assembly is a precision mechanical assembly designed to securely support and accurately position wafers during theta-axis alignment in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications, the assembly provides stable rotational positioning for high-precision wafer alignment and exposure. Semiconductor equipment technicians and field service engineers use this fixture assembly for replacement of worn mechanical components, preventive maintenance, and restoration of reliable wafer positioning. The assembly measures approximately 17-1/4 inches wide.

Applications:

The Ultratech Stepper 1064-701065 Rev. A Theta Wafer Fixture Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography equipment. The assembly supports theta-axis wafer positioning by securely holding the wafer fixture during rotational alignment, helping maintain accurate pattern registration and repeatable lithography performance. Compatibility should be verified using the original part number, revision level, dimensions, and the applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 1064-701065
• Revision: Rev. A
• Product Type: Theta Wafer Fixture Assembly
• Function: Theta-axis wafer support and rotational positioning
• Assembly Type: Precision Mechanical Fixture Assembly
• Width: 17-1/4 in.
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer alignment systems

Common Replacements:

• Ultratech Stepper 0516-460800 Theta Stage Assembly
• Ultratech Stepper 0515-461100 Wafer Fixture Plate
• Ultratech Stepper 01-20-02644 Theta Drive