Ultratech Stepper 01-20-02645 Wafer Chuck Assembly 03-20-03371 PCB Stepper Motor

Description:

The Ultratech Stepper 01-20-02645 Wafer Chuck Assembly with 03-20-03371 PCB Stepper Motor is a precision wafer handling assembly designed to securely position and accurately move semiconductor wafers during photolithography processes. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn wafer stage components, preventive maintenance, and restoration of precise wafer positioning and alignment. The assembly includes the 03-20-03371 PCB Stepper Motor and associated drive components; wafer chuck is not included.

Applications:

The Ultratech Stepper 01-20-02645 Wafer Chuck Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech 4700, 6700, Titan, and Saturn photolithography systems. The integrated stepper motor assembly provides accurate wafer positioning and stage movement required for high-resolution lithographic exposure and repeatable pattern registration. Compatibility should be verified using the original part numbers 01-20-02645 and 03-20-03371 before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 01-20-02645
• Associated Part Number: 03-20-03371
• Product Type: Wafer Chuck Assembly with PCB Stepper Motor
• Function: Precision wafer positioning and stage motion
• Motor Type: PCB Stepper Motor
• Compatible Equipment: Ultratech 4700, 6700, Titan, and Saturn Wafer Steppers
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer handling systems
• Note: Wafer chuck not included with assembly
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-20-03947
• Ultratech Stepper 01-20-08947
• Ultratech Stepper 01-20-03651