Ultratech Stepper 01-20-03947 Wafer Chuck Assembly 7-3/4 Chuck 01-20-03651

Description:

The Ultratech Stepper 01-20-03947 Wafer Chuck Assembly is a precision wafer handling assembly designed to securely hold and accurately position semiconductor wafers during photolithography processes. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications. Maintenance technicians and field service engineers use this assembly for replacement of worn wafer chuck mechanisms, preventive maintenance, and restoration of precise wafer alignment and exposure accuracy. This assembly features a 7-3/4-inch wafer chuck and includes associated component 01-20-03651.

Applications:

The Ultratech Stepper 01-20-03947 Wafer Chuck Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography equipment. The assembly provides stable wafer retention and precise positioning during exposure, ensuring accurate pattern registration and repeatable lithography performance. Compatibility should be verified using the original part number, revision level, and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 01-20-03947
• Associated Part Number: 01-20-03651
• Product Type: Wafer Chuck Assembly
• Chuck Diameter: 7-3/4 in.
• Function: Precision wafer holding and positioning
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer handling systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-20-02645
• Ultratech Stepper 01-20-03651
• Ultratech Stepper 03-20-03371