Ultratech Stepper 01-20-03947 Wafer Chuck Assembly Rapidsyn 13D-04A Stepper Motor

Description:

The Ultratech Stepper 01-20-03947 Wafer Chuck Assembly with Rapidsyn 13D-04A Stepper Motor is a precision wafer handling assembly designed to securely hold and accurately position semiconductor wafers during photolithography processes. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn wafer stage components, preventive maintenance, and restoration of precise wafer positioning and alignment. The assembly includes a Rapidsyn 13D-04A stepper motor and a 7-3/4-inch wafer chuck.

Applications:

The Ultratech Stepper 01-20-03947 Wafer Chuck Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography equipment. The integrated Rapidsyn 13D-04A stepper motor provides precise wafer stage movement, ensuring accurate alignment and repeatable pattern registration during lithography processes. Compatibility should be verified using the original part number, motor model, and applicable Ultratech stepper system before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 01-20-03947
• Motor Model: Rapidsyn 13D-04A
• Product Type: Wafer Chuck Assembly with Stepper Motor
• Chuck Diameter: 7-3/4 in.
• Motor Type: Stepper Motor
• Function: Precision wafer holding and positioning
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer handling systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-20-02645
• Ultratech Stepper 01-20-03651
• Ultratech Stepper 01-20-08947