Ultratech Stepper 03-20-01995 Motion Control PCB

Description:

The Ultratech Stepper 03-20-01995 BD Stage ASH 5 Axis Rev. D1 is an industrial motion control printed circuit board (PCB) designed to control the five-axis wafer stage assembly in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech 4700 and Titan wafer steppers where it operates in conjunction with the 03-20-00784 Slave VME Processor to provide synchronized stage positioning and precision motion control during wafer alignment and exposure. Semiconductor equipment technicians and field service engineers use this board for replacement of failed stage control PCBs, preventive maintenance, and restoration of accurate lithography system performance.

Applications:

The Ultratech Stepper 03-20-01995 BD Stage ASH 5 Axis Rev. D1 is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech 4700 and Titan photolithography systems. The board interfaces with the 03-20-00784 Slave VME Processor to coordinate five-axis stage movement, ensuring precise X-Y positioning, focus, and alignment required for high-resolution wafer exposure. Compatibility should be verified using the original part number, revision level, and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 03-20-01995
• Revision: Rev. D1
• Associated Part Number: 03-20-00784
• Product Type: BD Stage ASH 5 Axis PCB / Motion Control Board
• Function: Five-axis wafer stage motion control
• Processor Interface: Slave VME Processor (03-20-00784)
• Bus Architecture: VME
• Board Type: Industrial Motion Control PCB
• Compatible Equipment: Ultratech 4700 and Titan Wafer Stepper Systems
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer stage control systems

Common Replacements:

• Ultratech Stepper 03-20-04940
• Ultratech Stepper 03-20-01403-10
• Ultratech Stepper 03-20-00917