Ultratech Stepper 0516-460800 Theta Stage Assembly KS Equipment

Description:

The Ultratech Stepper 0516-460800 Theta Stage Assembly is a precision rotary stage assembly designed to provide accurate theta-axis rotation and wafer positioning in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers where it enables precise rotational alignment of the wafer chuck during exposure and alignment operations. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn theta stage components, preventive maintenance, and restoration of accurate wafer positioning. The assembly is manufactured by KS Equipment for OEM use in Ultratech stepper systems.

Applications:

The Ultratech Stepper 0516-460800 Theta Stage Assembly is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech photolithography equipment. The assembly provides smooth, repeatable rotational motion of the wafer stage, ensuring precise angular alignment and accurate pattern registration during lithography processes. Compatibility should be verified using the original part number and the applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper (KS Equipment OEM)
• Part Number: 0516-460800
• Product Type: Theta Stage Assembly
• Function: Precision theta-axis rotational positioning
• Stage Type: Rotary Wafer Stage Assembly
• Motion: Theta-Axis Rotation
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer stage positioning
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-20-02644 Theta Drive
• Ultratech Stepper 0506-245101 Stepper Motor Assembly
• Ultratech Stepper 0556-700856-R Theta Stepper Motor