Ultratech Stepper 0516-537100 Focus Monitor Assembly 0526-568900

Description:

The Ultratech Stepper 0516-537100 Focus Monitor Assembly is a precision optical monitoring assembly designed to continuously measure wafer focus and provide real-time feedback to the autofocus system in Ultratech semiconductor photolithography equipment. Commonly installed in Ultratech UltraStep 1000 wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications where accurate focus control is essential for high-resolution lithography. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn focus monitoring components, preventive maintenance, and restoration of precise autofocus performance. Available OEM assemblies include models 0516-537100 and 0526-568900.

Applications:

The Ultratech Stepper 0516-537100 Focus Monitor Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech UltraStep 1000 photolithography systems. The assembly monitors the wafer focal plane and provides continuous feedback to the focus control system, enabling accurate wafer positioning, consistent exposure quality, and repeatable pattern transfer during lithography operations. Compatibility should be verified using the original part number and the applicable Ultratech stepper model before installation. 

Technical Specifications:

• Brand: Ultratech Stepper
• Product Type: Focus Monitor Assembly
• Common Models: 0516-537100, 0526-568900
• Model Reference: 250-1
• Function: Real-time wafer focus monitoring and optical feedback
• System: Autofocus / Focus Monitoring Assembly
• Compatible Equipment: Ultratech UltraStep 1000 Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer alignment systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 0516-537100 Focus Monitor Assembly
• Ultratech Stepper 0526-568900 Focus Monitor Assembly
• Ultratech Stepper 0523-625800 Focus Converter