Ultratech Stepper 1052-677200 Rev. A UTS 13505-061787 Arm Assembly

Description:

The Ultratech Stepper 1052-677200 Rev. A Arm Assembly is a precision wafer handling component designed to support automated wafer transfer operations in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers equipped with automated loading systems, the assembly is identified by OEM reference number 13505-061787 and provides accurate wafer pickup, positioning, and transfer during production. Semiconductor equipment technicians and field service engineers use this arm assembly for replacement of worn handling components, preventive maintenance, and restoration of reliable autoloader performance.

Applications:

The Ultratech Stepper 1052-677200 Rev. A Arm Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography equipment. The assembly functions as part of the automated wafer loading mechanism, ensuring smooth wafer movement between cassettes and the exposure stage while maintaining precise positioning and minimizing handling errors. Compatibility should be verified using the original part number, OEM reference 13505-061787, and the applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 1052-677200
• Revision: Rev. A
• OEM Reference: 13505-061787
• Product Type: Arm Assembly
• Function: Automated wafer transfer and positioning
• Assembly Type: Precision Wafer Handling Arm
• Compatible Equipment: Ultratech Wafer Stepper Systems with Smart Autoloaders
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and automated wafer handling systems

Common Replacements:

• Ultratech Stepper 1052-677800A
• Ultratech Stepper 1052-669800A
• Ultratech Stepper 1052-671800A