ULVAC DA-15D Oil-Free Diaphragm Dry Vacuum Pump

Description:

The ULVAC DA-15D Nidec Diaphragm Dry Vacuum Pump is an oil-free diaphragm vacuum pump designed to provide clean, reliable vacuum generation for laboratory, industrial, and OEM equipment. Commonly installed in analytical instruments, semiconductor inspection equipment, packaging machines, vacuum tweezers, and automated manufacturing systems requiring continuous-duty vacuum operation. Maintenance technicians and system integrators use this pump for replacement of worn vacuum pumps, preventive maintenance, and restoration of dependable vacuum performance.

Applications:

The ULVAC DA-15D Diaphragm Dry Vacuum Pump is commonly used in semiconductor manufacturing, laboratory equipment, medical devices, vacuum chucks, optical equipment, printing machinery, and automated packaging systems where oil-free vacuum is required. Its diaphragm-type mechanism eliminates oil contamination while providing quiet operation, simple maintenance, and long service life for continuous industrial applications.

Technical Specifications:

• Brand: ULVAC (Nidec)
• Model: DA-15D
• Product Type: Diaphragm Dry Vacuum Pump
• Pump Type: Oil-Free Diaphragm Vacuum Pump
• Power Supply: Single Phase 220 VAC (model dependent)
• Frequency: 50/60 Hz
• Pumping Speed: 12/15 L/min (50/60 Hz)
• Ultimate Pressure: 6.65 kPa
• Inlet Diameter: 9 mm OD × 5 mm ID
• Motor Protection: Built-In Thermal Protector
• Application: Laboratory, semiconductor, and industrial vacuum systems
• Designed for continuous-duty industrial operation.

Common Replacements:

• ULVAC DA-30S
• ULVAC DA-20D
• ULVAC DA-40S