Unaxis Balzers 318185001 Cube Lite Outer Mask

Description:

The Unaxis Balzers 318185001 CUBE Lite Outer Mask BB282761-T W0228 (Part Number 318185001) is a precision process chamber outer mask designed to protect critical components and maintain plasma process uniformity in Unaxis Balzers CUBE Lite semiconductor processing systems. Commonly installed in plasma etching, dry etching, and wafer fabrication equipment utilizing the CUBE Lite process chamber. Semiconductor equipment technicians and maintenance engineers use this outer mask for replacement of worn process shields, preventive maintenance, and restoration of consistent chamber performance.

Applications:

The Unaxis Balzers 318185001 CUBE Lite Outer Mask BB282761-T W0228 is commonly used in semiconductor wafer fabrication, MEMS manufacturing, plasma etching, and thin-film processing systems where chamber protection and process repeatability are essential. Its precision-machined construction helps minimize plasma-induced erosion, reduce particle contamination, and maintain uniform process conditions for high-yield semiconductor manufacturing. Compatibility should be verified using the OEM part number 318185001 and equipment model before installation.

Technical Specifications:

• Brand: Unaxis Balzers
• Part Number: 318185001
• Model: BB282761-T W0228
• Product Type: CUBE Lite Outer Mask
• Function: Process chamber protection and plasma shielding
• Compatible Equipment: Unaxis Balzers CUBE Lite semiconductor processing systems
• Material: Precision-machined process material (OEM specification)
• Mounting: OEM replacement component
• Installation: Direct replacement for compatible process chambers
• Application: Plasma etching and semiconductor wafer processing
• Designed for continuous-duty semiconductor manufacturing applications.

Common Replacements:

• Unaxis Balzers BB282761-T CUBE Lite Outer Mask
• Unaxis OEM Outer Mask for CUBE Lite Process Chamber
• Compatible OEM Process Chamber Outer Mask matching Part Number 318185001