Unit Instruments UFC12005SLM02 Mass Flow Controller

Description:

The Unit Instruments UFC-1200A Mass Flow Controller is used in precision gas delivery systems to accurately measure and control the flow of process gases in semiconductor manufacturing, laboratory research, analytical instrumentation, and industrial process applications. Commonly installed in gas distribution panels, vacuum systems, semiconductor fabrication equipment, and high-purity gas handling systems requiring stable and repeatable flow control. Maintenance teams and system integrators use this controller for repair, retrofit, expansion, or replacement of existing mass flow control equipment. The UFC12005SLM02 configuration is designed for a full-scale flow capacity of 5 SLM with a maximum operating pressure of 500 PSI.

Applications:

The Unit Instruments UFC-1200A Mass Flow Controller is commonly used in semiconductor processing equipment, gas blending systems, analytical instruments, vacuum process equipment, calibration systems, and industrial gas handling applications. The controller continuously measures and regulates gas flow rates using thermal mass flow sensing technology, helping maintain process consistency, improve product quality, and ensure accurate delivery of process gases. The card-edge interface allows integration with automated process control systems and OEM gas delivery platforms.

Technical Specifications:

• Brand: Unit Instruments
• Part Number: UFC-1200A
• Configuration Number: UFC12005SLM02
• Product Type: Mass Flow Controller (MFC)
• Series: UFC-1200 Series
• Flow Capacity: 5 SLM (Standard Liters Per Minute)
• Maximum Pressure Rating: 500 PSI
• Function: Precision Gas Flow Measurement and Control
• Control Method: Thermal Mass Flow Sensing
• Application: High-Purity Gas Delivery Systems
• Controller Type: Closed-Loop Electronic Controller
• Interface Type: Card Edge Connector
• Flow Measurement: Mass Flow Based
• Gas Compatibility: Process and Specialty Gases
• Suitable for Semiconductor Equipment
• Suitable for Vacuum Processing Systems
• Suitable for Gas Distribution Panels
• Suitable for Laboratory Applications
• Suitable for Analytical Instrumentation
• Suitable for Research and Development Systems
• High Accuracy Flow Regulation
• Continuous Process Monitoring
• Industrial-Duty Construction
• Designed for Automated Process Control Systems
• Intended for OEM Equipment and Replacement Installations
• Suitable for Maintenance, Retrofit, and Repair Projects
• Engineered for Precise and Repeatable Gas Flow Control

Common Replacements:

• Unit Instruments UFC-1100A Mass Flow Controller
• Unit Instruments UFC-1665 Digital Metal-Seal Mass Flow Controller
• MKS Instruments 1179A Mass Flow Controller Series