V-TEK 3D80-000006-V1 Roll CAM Slit Valve Door Actuator
V-TEK 3D80-000006-V1 Roll CAM Slit Valve Door Actuator
Description:
Description:
The V-TEK 3D80-000006-V1 Roll CAM Slit Valve Door Actuator is used in semiconductor and vacuum processing equipment to actuate slit valve doors for controlled isolation between vacuum chambers and process modules. Commonly installed in wafer handling systems, semiconductor fabrication equipment, vacuum transfer chambers, and automated processing systems requiring precise door actuation. Maintenance teams and equipment technicians use this actuator for equipment repairs, preventive maintenance, replacement of worn components, and restoration of vacuum system operation.
Applications:
The V-TEK 3D80-000006-V1 Roll CAM Slit Valve Door Actuator is designed for vacuum automation applications requiring reliable opening and closing of slit valve doors. It is commonly used in semiconductor manufacturing equipment, vacuum deposition systems, wafer transfer systems, cleanroom processing equipment, and high-vacuum automation systems where precise motion control, chamber isolation, and dependable process operation are required.
Technical Specifications:
• Manufacturer: V-TEK
• Part Number: 3D80-000006-V1
• Product Type: Slit Valve Door Actuator
• Series: RollCAM
• Function: Slit Valve Door Actuation and Positioning
• Application: Vacuum Chamber Isolation Systems
• Compatible Equipment: Semiconductor and Vacuum Processing Equipment
• Actuation Type: Mechanical Door Actuation
• Motion Type: Controlled Open/Close Operation
• Installation Type: Equipment-Mounted Assembly
• System Compatibility: Slit Valve and Vacuum Transfer Systems
• Control Function: Chamber Access and Isolation Control
• Industrial Application: Semiconductor Manufacturing and Vacuum Processing
• Operating Environment: Cleanroom and High-Vacuum Facilities
• Maintenance Function: Valve Door Actuator Replacement
• Construction: Industrial-Grade Precision Actuator Assembly
Common Replacements:
• V-TEK RollCAM Slit Valve Actuator Assembly
• VAT Slit Valve Door Actuator
• OEM Vacuum Chamber Door Actuator Assembly
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