Varian 969-8973 Turbo-V301 Navigator Controller

The Varian 969-8973 Turbo-V301 Navigator Controller is a turbomolecular pump controller that drives and monitors Turbo-V 301 pumps in high- and ultra-high vacuum systems, a configuration widely found in semiconductor fabrication equipment, mass spectrometers, surface analysis instruments, and research vacuum chambers. It delivers motor drive, built-in diagnostics, and protective features, with remote communication capabilities to support integrated control of vacuum subsystems. Key specifications include: Manufacturer Varian Technologies (now part of Agilent Technologies); MPN 969-8973; Series Turbo-V 301 Navigator; Compatible Pump Turbo-V 301 Turbomolecular Pump; Input Voltage 100/120/220/240 VAC, Single Phase, 50/60 Hz; Maximum Input Power 300 VA; Output Voltage 75 VAC, 3-Phase; Output Frequency 963 Hz; Nominal Power 150 W; Communication Ports RS-232 and RS-485; Mounting Onboard Bottom Mount or Side Mount; Operating Temperature 0°C to +40°C; Storage Temperature -20°C to +70°C; Applications include semiconductor fabrication, analytical instrumentation, electron microscopy, leak detection, and other scientific research equipment requiring clean, stable, high-speed vacuum generation. Common replacements include Varian 969-8972, 969-8979, and Agilent Turbo-V301 Navigator Controller.