ZYGO ZMI- MEAS BD 8020-0210-01-J VME MEASUREMENT BOARD 8020021001J

Description:

The Zygo ZMI Measurement Board 8020-0210-01-J (ZMI-2001) is a VME-based measurement electronics module used in high-precision optical and motion control systems. Commonly installed in interferometer-based measurement setups within semiconductor, metrology, and precision manufacturing environments. Maintenance teams, engineers, and system integrators use this board for system control, retrofit, or replacement of displacement measurement electronics.

Applications:

The Zygo ZMI-2001 measurement board is designed for ultra-precise position measurement and control using laser interferometry. It is widely used in semiconductor lithography equipment, precision machining systems, and scientific instrumentation where nanometer-level accuracy is required. The board processes optical measurement signals and provides real-time feedback for motion control systems, ensuring high accuracy and stability in critical applications.

Technical Specifications:

• Manufacturer: Zygo Corporation
• Model / Part Number: ZMI-2001 (8020-0210-01-J)
• Product Type: VME Measurement Board / Metrology Module
• Form Factor: 6U VME bus compatible board
• Measurement Type: Laser interferometer-based displacement measurement
• Axis Support: Single-axis measurement (expandable to multi-axis systems)

Common Replacements:

• Zygo ZMI-2002 Measurement Board (dual-axis version)
• Zygo ZMI-4004 VME Measurement Board
• Zygo ZMI-4104 Measurement Electronics Module